Roxhed, N. : rechercher sur Z-Library

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1

Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs

Frank Niklaus, Adit Decharat, Fredrik Forsberg, Niclas Roxhed, Martin Lapisa, Michael Populin, Fabian Zimmer, Jörn Lemm, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Année:

2009

Langue:

english

Fichier:

PDF, 894 KB

english, 2009

2

Painless Drug Delivery Through Microneedle-Based Transdermal Patches Featuring Active Infusion

Roxhed, N., Samel, B., Nordquist, L., Griss, P., Stemme, G.

Journal:

IEEE Transactions on Biomedical Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2008

3

Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

Forsberg, Fredrik, Roxhed, Niclas, Fischer, Andreas C., Samel, Björn, Ericsson, Per, Hoivik, Nils, Lapadatu, Adriana, Bring, Martin, Kittilsland, Gjermund, Stemme, Göran, Niklaus, Frank

Journal:

Infrared Physics & Technology

Année:

2013

Langue:

english

Fichier:

PDF, 1.75 MB

english, 2013

4

Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices

Sterner, Mikael, Roxhed, Niclas, Stemme, Göran, Oberhammer, Joachim

Journal:

Journal of Microelectromechanical Systems

Année:

2011

Langue:

english

Fichier:

PDF, 1.95 MB

english, 2011

5

Integrating MEMS and ICs

Fischer, Andreas C., Forsberg, Fredrik, Lapisa, Martin, Bleiker, Simon J., Stemme, Göran, Roxhed, Niclas, Niklaus, Frank

Journal:

Microsystems & Nanoengineering

Année:

2015

Langue:

english

Fichier:

PDF, 9.04 MB

english, 2015

6

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Microneedle-based system for minimally invasive continuous monitoring of glucose in the dermal interstitial fluid

Ribet, Federico, Stemme, Goran, Roxhed, Nielas

Année:

2018

Langue:

english

Fichier:

PDF, 417 KB

english, 2018

7

Membrane-sealed hollow microneedles and related administration schemes for transdermal drug delivery

Niclas Roxhed, Patrick Griss, Göran Stemme

Journal:

Biomedical Microdevices

Année:

2008

Langue:

english

Fichier:

PDF, 352 KB

english, 2008

8

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Hermetic integration of liquids in MEMS by room temperature, high-speed plugging of liquid-filled cavities at wafer level

Antelius, M., Fischer, A.C., Niklaus, F., Stemme, G., Roxhed, N.

Année:

2011

Langue:

english

Fichier:

PDF, 1.63 MB

english, 2011

9

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Selective electroless nickel plating on oxygen-plasma-activated gold seed-layers for the fabrication of low contact resistance vias and microstructures

Fischer, A. C., Lapisa, M., Roxhed, N., Stemme, G., Niklaus, F.

Année:

2010

Langue:

english

Fichier:

PDF, 4.40 MB

english, 2010

10

A method for tapered deep reactive ion etching using a modified Bosch process

Roxhed, Niclas, Griss, Patrick, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Année:

2007

Langue:

english

Fichier:

PDF, 289 KB

english, 2007

11

A MEMS-based passive hydrocephalus shunt for body position controlled intracranial pressure regulation

S. B. Johansson, A. Eklund, J. Malm, G. Stemme, N. Roxhed

Journal:

Biomedical Microdevices

Année:

2014

Langue:

english

Fichier:

PDF, 1023 KB

english, 2014

12

A MEMS-based passive air flow regulator for handheld breath diagnostics

Johansson, Staffan B., Stemme, Göran, Roxhed, Niclas

Journal:

Sensors and Actuators A: Physical

Année:

2014

Langue:

english

Fichier:

PDF, 1.80 MB

english, 2014

13

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Tapered Deep Reactive Ion Etching: Method and Characterization

Roxhed, Niclas, Griss, Patrick, Stemme, Goran

Année:

2007

Langue:

english

Fichier:

PDF, 714 KB

english, 2007

14

Batch Transfer of Radially Expanded Die Arrays for Heterogeneous Integration Using Different Wafer Sizes

Forsberg, Fredrik, Roxhed, Niclas, Haraldsson, Tommy, Liu, Yitong, Stemme, Göran, Niklaus, Frank

Journal:

Journal of Microelectromechanical Systems

Année:

2012

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2012

15

Wafer-Level Vacuum Sealing by Coining of Wire Bonded Gold Bumps

Antelius, Mikael, Fischer, Andreas C., Roxhed, Niclas, Stemme, Goran, Niklaus, Frank

Journal:

Journal of Microelectromechanical Systems

Année:

2013

Langue:

english

Fichier:

PDF, 4.40 MB

english, 2013

16

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Compact, Seamless Integration of Active Dosing and Actuation with Microneedles for Transdermal Drug Delivery

Roxhed, N., Samel, B., Nordquistt, L., Griss, P., Stemme, G.

Année:

2006

Langue:

english

Fichier:

PDF, 4.57 MB

english, 2006

17

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - High-performance quantum-well silicon-germanium bolometers using IC-compatible integration for low-cost infrared imagers

Forsberg, Fredrik, Roxhed, Niclas, Ericsson, Per, Wissmar, Stanley, Niklaus, Frank, Stemme, Goran

Année:

2009

Langue:

english

Fichier:

PDF, 1.91 MB

english, 2009

18

[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - High-performance infrared micro-bolometer arrays manufactured using very large scale heterogeneous integration

Forsberg, Fredrik, Fischer, Andreas C., Stemme, Goran, Roxhed, Niclas, Niklaus, Frank, Ericsson, Per, Samel, Bjorn

Année:

2011

Langue:

english

Fichier:

PDF, 1.34 MB

english, 2011

19

An amperometric nitric oxide sensor with fast response and ppb-level concentration detection relevant to asthma monitoring

Gatty, Hithesh K., Leijonmarck, Simon, Antelius, Mikael, Stemme, Göran, Roxhed, Niclas

Journal:

Sensors and Actuators B: Chemical

Année:

2015

Langue:

english

Fichier:

PDF, 1.53 MB

english, 2015

20

[IEEE 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2012.05.22-2012.05.23)] 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration - Wafer-level heterogeneous 3D integration for MEMS and NEMS

Niklaus, Frank, Lapisa, Martin, Bleiker, Simon J., Dubois, Valentin, Roxhed, Niclas, Fischer, Andreas C., Forsberg, Fredrik, Stemme, Goran, Grogg, Daniel, Despont, Michel

Année:

2012

Langue:

english

Fichier:

PDF, 3.63 MB

english, 2012

21

High-Aspect-Ratio Through Silicon Vias for High-Frequency Application Fabricated by Magnetic Assembly of Gold-Coated Nickel Wires

Bleiker, Simon J., Fischer, Andreas C., Shah, Umer, Somjit, Nutapong, Haraldsson, Tommy, Roxhed, Niclas, Oberhammer, Joachim, Stemme, Goran, Niklaus, Frank

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Année:

2015

Langue:

english

Fichier:

PDF, 4.28 MB

english, 2015

22

Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication

Schmidt, Torsten, Zhang, Miao, Sychugov, Ilya, Roxhed, Niclas, Linnros, Jan

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2015

23

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Ionic liquid microdroplet manipulation by electrowetting-on-dielectric for on/off diffusion control

Ribet, Federico, De Pietro, Luca, Roxhed, Nielas, Stemme, Goran

Année:

2018

Langue:

english

Fichier:

PDF, 402 KB

english, 2018

24

High Yield Passive Plasma Filtration from Human Finger Prick Blood

Hauser, Janosch, Lenk, Gabriel, Hansson, Jonas, Beck, Olof, Stemme, Göran, Roxhed, Niclas

Journal:

Analytical Chemistry

Année:

2018

Langue:

english

Fichier:

PDF, 801 KB

english, 2018

25

A Miniaturized Amperometric Hydrogen Sulfide Sensor Applicable for Bad Breath Monitoring

Gatty, Hithesh, Stemme, Göran, Roxhed, Niclas

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 2.49 MB

english, 2018

26

Real-time intradermal continuous glucose monitoring using a minimally invasive microneedle-based system

Ribet, Federico, Stemme, Göran, Roxhed, Niclas

Journal:

Biomedical Microdevices

Année:

2018

Langue:

english

Fichier:

PDF, 3.70 MB

english, 2018

27

A microfluidic device for TEM sample preparation

Hauser, Janosch, Kylberg, Gustaf, Colomb-Delsuc, Mathieu, Stemme, GÃ¶ran, Sintorn, Ida-Maria, Roxhed, Niclas

Journal:

Année:

2020

Fichier:

PDF, 2.60 MB

2020

28

Novel Microneedle Patches for Active Insulin Delivery are Efficient in Maintaining Glycaemic Control: An Initial Comparison with Subcutaneous Administration

Lina Nordquist, Niclas Roxhed, Patrick Griss, Göran Stemme

Journal:

Pharmaceutical Research

Année:

2007

Langue:

english

Fichier:

PDF, 477 KB

english, 2007

29

A liquid-triggered liquid microvalve for on-chip flow control

Jessica Melin, Niclas Roxhed, Guillem Gimenez, Patrick Griss, Wouter van der Wijngaart, Göran Stemme

Journal:

Sensors and Actuators B: Chemical

Année:

2004

Langue:

english

Fichier:

PDF, 247 KB

english, 2004

30

A compact, low-cost microliter-range liquid dispenser based on expandable microspheres

Roxhed, N, Rydholm, S, Samel, B, Wijngaart, W van der, Griss, P, Stemme, G

Journal:

Journal of Micromechanics and Microengineering

Année:

2006

Langue:

english

Fichier:

PDF, 309 KB

english, 2006

31

Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration

Sterner, M., Roxhed, N., Stemme, G., Oberhammer, J.

Journal:

IEEE Transactions on Electron Devices

Année:

2010

Langue:

english

Fichier:

PDF, 1.99 MB

english, 2010

32

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Low cost device for precise microliter range liquid dispensing

Roxhed, N., Rydholm, S., Samel, B., van der Wijngaart, W., Griss, P., Stemme, G.

Année:

2004

Langue:

english

Fichier:

PDF, 265 KB

english, 2004

33

Pt–Al 2 O 3 dual layer atomic layer deposition coating in high aspect ratio nanopores

Pardon, Gaspard, Gatty, Hithesh K, Stemme, Göran, Wijngaart, Wouter van der, Roxhed, Niclas

Journal:

Année:

2013

Langue:

english

Fichier:

PDF, 1.18 MB

english, 2013

34

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida (Monday 25 April 2011)] Infrared Technology and Applications XXXVII - Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Ericsson, Per, Fischer, Andreas C., Forsberg, Fredrik, Roxhed, Niclas, Samel, Björn, Savage, Susan, Stemme, Göran, Wissmar, Stanley, Öberg, Olof, Niklaus, Frank, Andresen, Bjørn F., Fulop, Gabor F., N

Année:

2011

Langue:

english

Fichier:

PDF, 1.99 MB

english, 2011

35

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - A ppb level, miniaturized fast response amperometric nitric oxide sensor for asthma diagnostics

Gatty, Hithesh K, Leijonmarck, S., Antelius, M., Stemme, G., Roxhed, N.

Année:

2013

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2013

36

Unconventional applications of wire bonding create opportunities for microsystem integration

Fischer, A C, Korvink, J G, Roxhed, N, Stemme, G, Wallrabe, U, Niklaus, F

Journal:

Journal of Micromechanics and Microengineering

Année:

2013

Langue:

english

Fichier:

PDF, 3.49 MB

english, 2013

37

[IEEE 2007 IEEE/MTT-S International Microwave Symposium - Honolulu, HI, USA (2007.06.3-2007.06.8)] 2007 IEEE/MTT-S International Microwave Symposium - Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches

Sterner, Mikael, Roxhed, Niclas, Stemme, Goran, Oberhammer, Joachim

Année:

2007

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2007

38

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - A compact passive air flow regulator for portable breath diagnostics

Johansson, Staffan B., Stemme, Goran, Roxhed, Niclas

Année:

2013

Langue:

english

Fichier:

PDF, 916 KB

english, 2013

39

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Temporary wafer bonding and debonding by an electrochemically active polymer adhesive for 3D integration

Gatty, Hithesh K, Niklaus, Frank, Stemme, Goran, Roxhed, Niclas

Année:

2013

Langue:

english

Fichier:

PDF, 1.96 MB

english, 2013

40

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fabrication of high aspect ratio through silicon vias (TSVs) by magnetic assembly of nickel wires

Fischer, A. C., Roxhed, N., Haraldsson, T., Heinig, N., Stemme, G., Niklaus, F.

Année:

2011

Langue:

english

Fichier:

PDF, 2.69 MB

english, 2011

41

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Heterogeneous integration technology for combination of different wafer sizes using an expandable handle substrate

Forsberg, F., Roxhed, N., Stemme, G., Niklaus, F.

Année:

2011

Langue:

english

Fichier:

PDF, 2.17 MB

english, 2011

42

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Low-cost through silicon vias (TSVs) with wire-bonded metal cores and low capacitive substrate-coupling

Fischer, A. C., Roxhed, N., Stemme, G., Niklaus, F.

Année:

2010

Langue:

english

Fichier:

PDF, 4.67 MB

english, 2010

43

Roxhed, Niclas, Gasser, T. Christian, Griss, Patrick, Holzapfel, Gerhard A., Stemme, GÖran

Journal:

Journal of Microelectromechanical Systems

Année:

2007

Langue:

english

Fichier:

PDF, 799 KB

english, 2007

44

Very high aspect ratio through-silicon vias (TSVs) fabricated using automated magnetic assembly of nickel wires

Fischer, A C, Bleiker, S J, Haraldsson, T, Roxhed, N, Stemme, G, Niklaus, F

Journal:

Journal of Micromechanics and Microengineering

Année:

2012

Langue:

english

Fichier:

PDF, 1.37 MB

english, 2012

45

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Mechanically Bi-Stable In-Plane Switch with Dual-Stiffness Actuators

Sterner, M., Roxhed, N., Stemme, G., Oberhammer, J.

Année:

2007

Langue:

english

Fichier:

PDF, 497 KB

english, 2007

46

[IEEE 2007 European Microwave Integrated Circuit Conference - Munich, Germany (2007.10.8-2007.10.10)] 2007 European Microwave Integrated Circuit Conference - Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line

Sterner, Mikael, Roxhed, Niclas, Stemme, Goran, Oberhammer, Joachim

Année:

2007

Langue:

english

Fichier:

PDF, 789 KB

english, 2007

47

Intradermal Insulin Delivery: A Promising Future for Diabetes Management

Hultstrom, M., Roxhed, N., Nordquist, L.

Journal:

Journal of Diabetes Science and Technology

Année:

2014

Langue:

english

Fichier:

PDF, 592 KB

english, 2014

48

A fast passive and planar liquid sample micromixer

Melin, Jessica, Gim�nez, Guillem, Roxhed, Niclas, Wijngaart, Wouter van der, Stemme, G�ran

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 1.89 MB

english, 2004

49

CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration

Forsberg, Fredrik, Lapadatu, Adriana, Kittilsland, Gjermund, Martinsen, Stian, Roxhed, Niclas, Fischer, Andreas C., Stemme, Goran, Samel, Bjorn, Ericsson, Per, Hoivik, Nils, Bakke, Thor, Bring, Martin

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Année:

2015

Langue:

english

Fichier:

PDF, 8.05 MB

english, 2015

50

A comparative study of the bonding energy in adhesive wafer bonding

Forsberg, F, Saharil, F, Haraldsson, T, Roxhed, N, Stemme, G, van der Wijngaart, W, Niklaus, F

Journal:

Journal of Micromechanics and Microengineering

Année:

2013

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2013